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V

ARIANCECOMPONENTSANALYSIS-

M

INITABEXAMPLE

Retrieve'PchannelVCA.MTW'

MTB > Nested c6 = c1

c2 c3

Analysisof Variancefor p256vt

Source lot
wafer dieloc Total

DF
5
30 143 178

SS 2115032.0000
704705.0625
441397.5625 3261134.5000

MS 423006.4062
23490.1699
3086.6960

F

P

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VarianceComponents

Source lot
wafer dieloc Total

VarComp. 13512.056
4104.841
3086.696 20703.592

% ofTotal
65.26
19.83
14.91

StdDev 116.241
64.069
55.558 143.887

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MTB > Nested C8= C1C2C3

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