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WAFER
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List reliability degradationmechanisms For each reliability degradationmechanism,list the structuresthat could be |
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impacted(Example: |
Electromigration-- First metal,w/ and w/o steps) |
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Prioritize-- Find the mostsensitivestructuresfor each reliability degradation mechanism Evaluate structureson current PC patterns-- Are the mostsensitive structuresrepresented? Determineadditional structures Designadditional teststructures Performappropriatecorrelationstudies(to burn-in/tempcycle/HAST Determinesensitivityto known or suspectedvariable/problemareas |
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* |
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* * * |
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