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SEMICONDUCTOR |
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1. |
Indirect relationshipof processparametersto deviceperformance |
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MostIC fabrication operationsinvolvechemicalinputs and outputs,that relateindirectly to deviceperformance(electricaloutputs) Effectson SPC - in many cases,speclimitsweresetsomewhat arbi trarily |
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(that |
is, not basedupon the effect on deviceperformance) |
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2. |
Quantity of processoperations,input and output parameters |
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Thereare literally hundredsor thousandsof processparameters(input and output) that can effect the product Effectson SPC - thereare insufficient resourcesto completely characterizeeach parameter |
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