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Microelectromechanical Systems (MEMS)

Micro- & Nanotechnology & engineering of miniaturization


Domain

Explanation

MUM?

  • MEMS or microelectromechanical systems

What's that?

  • From the name, we know that MEMS are working assemblies of electrical & mechanical components of very small size
  • MEMS are then purpose-built miniature devices or systems using micro- and nanotechnology

Micro? Nano?

  • In engineering terms, the SI unit for length is metre (m)
  • Micro refers to micrometre (m m) and Nano refers to nanometre (nm)
  • The term " micro- and nanotechnology" is broadly defined to encompass the synthesis & integration of materials, processes and devices of submicron size (<m m)

What's the catch?

  • Although MEMS sound like space-age science-fiction (like mini-robots swimming in our blood vessels & clearing up & detecting diseases), it is scotching hot technology domain with active research & development
  • The impact on our present & future can be far-reaching

Why so?

  • There exists tremendous potential & inherent benefits as listed below:
  1. Dramatic payload downsizing
  2. Reduced development & test costs: at a fraction of the costs of a mega-project, each microinstrument can reduce costs of production & failure as well as expanding test width & depth
  3. Lower volume: less scarce resources & materials needed (though just like anything free, this might induce unwarranted over-production & excess-capacity); ability to penetrate into voids that are not accessible with bulky devices
  4. Lower weight with lower power & thermal demands: with distributed micromachinery, less cumulative power is consumed with consequent higher efficiency
  5. Less susceptibility to shock: catastrophic failures of large equipment occur mostly due to loosening parts during shock & vibration; with smaller size & better design & fabrication, microinstruments are more robust
  6. Improved reliability through redundancy: more tolerant of imperfections, uncertainties and indeterminacy
  7. Enhanced data acquisition & awareness through distributed sensor networks: with more sensors spread over larger domain
  8. Integration of microsensors with electronics: to produce complete, stand-alone, application-specific microinstruments

All good news?

  • Not necessarily
  • MEMS is still an emerging science & engineering
  • New materials have to be synthesized and new technologies from concept & design to fabrication & usage are still in the green phase of R&D
  • Already microdevices increase complexity, require more stringent controls during materials processing & impose stricter demands on materials compatibility

What's the vision for MUM?

  • MEMS
  • It is a natural step in the electronics revolution from bungalow-big computer to transistors to integrated circuit (IC) to integrated microcircuit (IMC)
  • Design philosophy based on distribution & divisions - the parts make the whole

Industry trend?

  • Historically, American high technology serves first, the needs of government agencies & then, the civilian sector
  • In the case of microengineering, it is the opposite where the majority of applications are directed at the civilian sector & less to government ones
  • Investments by some commercial entities:
  1. GM, Ford
  2. IBM, HP, Motorola
  3. Lucas Novasensor
  4. DARPA (Defense Advanced Research Projects Agency)
  • R&D by American national microengineering facilities:
  1. Sandia National Labs
  2. Lawrence Livermore National Lab
  3. Naval Research Lab
  4. Jet Propulsion Lab
  • Joint industry-university consortia like those involving Cornell, Stanford, UC Berkeley & commercial foundry networks like MOSIS & launched at a fraction of today's costs
  • Other countries include the EC & Singapore

Likely uses?

  • As microsensors & microinstruments for guidance, navigation & control: temperature, pressure, chemicals, optics, tribologics
  • Spacecraft technologies: nanosatellites, communications, thermal control, power systems & ordnance
  • Electronic packaging with multichip modules
  • Microfabrication & microelectronics
  • Cost reduction with widespread miniaturization: after critical mass reached

Apply to structural mechanics?

  • The design concept:
  1. Understanding of mechnical behaviour of microdevices
  2. R&D of micromechanics
  3. Exploration into & exploitation for structural use
  • The scope of nanotechnology for structural mechanics:
  1. Adaptive structures: by increasing damping, reducing vibration & weights
  2. Fabrication of nanodevices such as sensors & actuators
  3. Microelectronic machining
  4. Materials synthesis
  5. Concepts for revolutionary structural design, components & foundation-control-structure-environment interaction
  • Emphasis is on:
  1. Performance improvement of structural components & systems by means of miniature patch devices
  2. To improve guidance & control systems
  3. For miniature devices to replace current marginal ones
  • Examples of research efforts:
  1. Embedding microdevices & control elements directly into structural elements like truss, beams, slabs & columns
  2. SMA wires embedded to control stiffness or actuation
  3. Guidance controls for optics
  4. Replace ball bearings (limiting factor of service life) with special lubricants & electrostatically or -magnetically driven devices to eliminate friction
  5. Fracture mechanics & control

Any useful terms to keep note?

  • MEMS
  • ASIM: application-specific integrated microinstrument
  • ASIC: application-specific integrated circuit
  • Micromachined gyros, accelerometers, magnetometers, sensors (star, sun & earth) & actuators (piezo: vehicle attitude control, optical wavefront & pointing control, deformable mirrors, shape & vibration control)
  • Mini- (10kg~500kg), micro- (0.1kg~10kg) & nanosatellite (<0.1kg)

Extracted from H.Helvajian and E.Y.Robinson, "Micro- and Nanotechnology for Space Systems", The Aerospace Corporation, 1997

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