What do you know about MEMS? Do you know that MEMS are smaller than the diameter of the human hair follicle for more info try the following links
http://www.sandia.gov/mstc/index.html
MEMSnet information service for the MEMS development community, maintained by the MEMS Exchange
Some CAE Design tools for MEMS
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Other MEMS Sites Journal of Microelectromechanical Systems Sensors and Actuators A: Physical Journal of Micromechanics and Microengineering Berkeley
COMPANIES selling equipment Applied Materials http://www.appliedmaterials.com/intro.html Novellus Systems http://www.novellus.com/index.htm KLA-Tencor http://www.kla-tencor.com/indexflash.html Lam Research http://www.lamrc.com/ TEL America http://www.telusa.com/ ASM Lithography http://www.asml.com/ Axcelis http://www.axcelis.com/ MEMC http://www.memc.com/ MKS Instruments http://www.mksinst.com/ selling wafers Univefsity Wafer http://www.universitywafer.com/
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AccelerometersSingle and Multilayer Electroplated
Microaccelerometers Accelerometer/GIFimage 640x324 pixels Hitachi Closed Loop Capacitive Accelerometer Nissan Integrated Silicon Accelerometer Tohoku University Integrated Capacitive
Accelerometer Modern Accelerometers Accelerometer Intrinsics Accelerometer/GIFimage 267x196 pixels Accelerometer and 68HC05 by Motorola Accelerometer by Allied Electronics MIT microaccelerometer. GIF image 764x993
pixels CSMT Sensor Technology/ (Microseismometer and ACCELER2.GIF MAT Berlin - Two-Axis Accelerometer Northeastern
University:Microsensors:Microaccelerometer Top View of a Force-Balanced Accelerometer Chip Surface-Micromachined Accelerometer Circuit Organization in the Hitachi
Force-Balanced Integrated Accelerometer - Analog Devices Actuators/Microactuators: Overview
Microactuators.c4_s1 Microactuators.c4_s2 Actuator Arrays Actuators Aluminum MEMS Structures Deforming Film Actuators - Tohoku University Description of IMMI's BITS Microactuators MAT Berlin - Micro Actuator - Design MAT Berlin - Micro Actuator - Fabrication Microactuator Microactuators Microactuators Microactuators MICROACTUATORS:TECHNOLOGY, DEVICES, Microfabricated nickel actuators Organic Thermal Actuators Shape Memory Alloy SMA Actuator/TiNi Survey of Micro-Actuator Technologies BearingsSMAR THYDRODYNAMIC BEARING IFM Research Areas Closeup of CaMEL Bearing2 Element Micromachined Smart Bearings BiomedicalHeart cell contractions measured using a
micromachined Cell Impedance Probe Project Microsystems for the Hearing Impaired Duodeno fiberscope Currently Marketed by
Olympus Microfabricated cell culture 'device'. GIF
image 816x631 Biological SensorsPatterning Cultured Neurons Thin-Film Microelectrode Arrays for Neural Micro Probes for Neurophysiology Penetrating Cortical Probes Regeneration_TypeNeural Interfaces Hybrid Biosensors Controlled Patterning of Cultured
Neurons/Figure Thin-Film Microelectrode Arrays for Neural Injectionmoulding micropump Micro-Total-AnalysisSystems. 킫AS BIOMEDICALAPPLICATIONS GROUP - BIOMEDICALAPPLICATIONS GROUP - DNANanotechnology in Ned Seeman's Laboratory CantiliversOLYMPUS micro cantilevers for SPM Technical data of silicon nitride cantilevers AFM Thermomechanical Data Storage Cantilevers for MRFM Image of cantilevers. JPEG image 1024x960
pixels ChoppersOptical light chopper. GIF image 616x455 pixels ChromatographyTU-HHHLT, A Micro Gaschromatograph Organization of a Miniature Gas Chromatography
System FlowmetersFlow Controller/Redwood Mass Microrotor for blood flow. GIF image 552x712
pixels Flowsensors Thermal Flow Sensor Mass FlowmetersMonolithic Mass Flowmeter with On-Chip CMOS
RInterface Circuitry Gas DetectorsSilicon Micromachined Gas Detector - University
of Michigan GearsGuckel LIGA gears. GIF image 816x654 pixels IFM Research Areas GyroscopesNickel tuning fork gyroscope. GIF image 896x704
pixels HingesHinge/MCNC/GIF image 335x259 pixels Closeup Sideview of Hinge Magnetic DevicesA Planar Variable Reluctance Magnetic
Micromotor MicroInductor for High Frequency Applications An Integrated Electromagnet for use as a
Microrelay Driving Element Micromachined Polymer Magnets MembranesThin film gas-selective membranes MicromachinesMicromachines Atomic-scalemachine. GIF image 382x298 pixels MicromotorsEMPRL projects in MEMs and Micromachining Wisconsin magnetostatic motor. GIF image
712x924 pixels Mehregany electrostatic motor. GIF image
676x898 pixels Salient-Pole Micromotor (234K) Wobble Micromotor (236K) Outer-Rotor Micromotor (240K) Salient-Pole Millimotor (318K) Micromachined Rotating Gyroscope Micro-Electric Generator. generato.html Wobble Micromotor (236K).gif Outer-Rotor Micromotor (240K).gif Salient-Pole Millimotor (318K).gif Salient-Pole Micromotor (microSPmotor.gif) Rotary Side Drive Motor - Top View Rotary Side Drive Motor - Side View Harmonicor Wobble Motor Rotary Comb Drive Rotary Side Drive Motor with Stacked Poly1 and
Poly2 Rotor and Stator Closeup of Bearing and Rotor of Stacked Poly
Motor Closeup of Stator-Rotor Air Gap of Stacked Poly
Motor Poly2 Rotary Side Drive Motor MicropumpsMicromembrane pump Micro-Blast TUHH, Micromechanical Pumps A Silicon Micromachined Micropump MicrovalvesRedwood Microsystems Silicon Micromachined Prototype Valve Microvalves Microvalve.GIF image 233x144 pixels Electromagnetically Driven Microvalve - NTT Optical Devices/MirrorsA MEMS-Based Array of Actuated Micromirrors Programmable Micro Mirror Array Integrated Silicon Micro Optics in ETIS Micromachined Movable Platforms as Integrated
Optic Devices Ultrafast Optics at the NSL Simple Binary Optical Elements for Aberration
Correction in Confocal Microscopy Fresnel Lens/GIF image 713x401 pixels Power Supplies for MEMSA Miniaturized High Voltage Solar Cell Array As
An Electrostatic MEMS Power RelaysIMMI's Products Microrelay contact Northeastern: microsensors: microrelay Microrelay contact (relayc.gif) Miniature electromechanical relays Design, fabrication, and characterization of
electrostatic microrelays Fabrication of Electrostatic Nickel Microrelays
by Nickel Surface Micromachining MicroRelay MicroRelay ResonatorsIntegrated Resonant Magnetic Field Sensor MIT Micromechanics Group, MEMS Research Surface-Micromachined Micromechanical Resonator
Chip Linear Comb Resonator SensorsIntegrated sensors Epitaxial poly for surface micromachined smart
sensors Solid-State Microsensors Integrated Sensors/Research Project
Micromachining Sensor Technology at LLNL Microsensors LWIM Presentation at Hilton Head Conference,
June 1996 The Stanford Micro-Calorimeter Sensor Microsystems Design Group Home Page Microsystems Design Group Projects Page MIT Project: Silicon Wafer Bonding
Micromachined Devices Sensors Chemical SensorsMAT Berlin - Basic Modules for Chemical
Sensors Micromachined Electrophoresis and Fluidic
Devices Micromachined Spectrometers Electroanalytical System Based on Thin-Film
Microelectrode Arrays Fabry Perot SensorsSkin Effect Circuit Models Image Sensors3D Computational Image Sensors Inertial SensorsInertial measurement units Mechanical SensorsAluminum-MEMS Systems Development Micromechanical Force Probes Micromachined Tactile Sensor Arrays Accelerometers MEMS Devices Through Deep Reactive Ion
Etching of Single-Crystal Silicon Pressure SensorsUW-MEMS- Research - Polysilicon Planar
Pressure Transducer Optically-Interrogated Fabry-Perot Pressure
Transducers Fabry-Perot Based Pressure Transducers Toyota Surface Micromachined Piezoresistive
Microdiaphragm Toyota 1K-Element Piezoresistive
Pressure/Tactile Sensor Array Toyota Capacitive Pressure Sensor with CMOS
Electronics Nippon densoIntegrated Pressure and
Temperature Sensor Chip Yokogawa Resonant Microbeam Pressure Sensor Tohoku University Integrated Capacitive
Pressure Sensor Piezoresistive Pressure Sensor Organization of the Toyota Tactile Imager
Readout Electronics Pressure Sensor Evolution in the Toyota
Tactile Imager Circuit Organization in the
Digitally-Compensated Toyota Pressure Sensor Structure and Excitation Scheme for the
Yokogawa DPharp Resonant Pressure Sensor Integrated Pressure Sensor - NOVA Micromachined Resonant Pressure Sensor -
Yokogawa Capacitive pressure sensor Sensor-Circuit Integration and System PartitioningSensor-Circuit Integration and System
Partitioning. c5_s1 Sensor-Circuit Integration and System
Partitioning. c5_s2 Sensor-Circuit Integration and System
Partitioning. c5_s3 Sensor-Circuit Integration and System
Partitioning. c5_s4 Sensor-Circuit Integration and System
Partitioning. c5_s5 SOI SensorsNortheastern University:Microsensors:SOI Stress SensorsMIT shear stress sensor. GIF image 688x916
pixels Thermal SensorsMICROFABRICATED ARRAYS OF THERMOCOUPLES. Switched thin film thermocouple arrays. JPEG
image 553x415 pixels Electrochemically Etched, Thermally Isolated
Single-Crystal SiliconStructures Organic Thermal Acuators Tunneling SensorsTunneling Sensors Home Page Inductive Proximity Sensors Two-coil inductive proximity sensor Yield of manufactured sensors SlidersElectromechanical slider. GIF image 652x508
pixels SpectrometersNortheastern
University:Microsensors:Microspectrometer Strain GaugesMicrostrain gauge. GIF image 664x658 pixels StructuresPoly-SiC lateral resonant structure Comb-finger section of poly-SiC microstructure Electroless plated nickel microstructure Intelligent micromachines Large Pop-up Structure ToolsIFM Research Areas TweezersMicrofabricated Tweezers with a Large Gripping
Force and a Large Range of Motion Microforceps - Berkeley Sensor and Actuator
Center Microfabricated Tweezers with a Large Gripping
Force and a Large Range of Motion A microgripper Microtweezer (270K).gif IMMI's Products IMMI's Technology Integrated sensors MICROELECTROMECHANICAL SYSTEMS DEVELOPMENT IN
JAPAN Micromachined Movable Platforms as Integrated
Optic Devices Sensor Technology at LLNL Silicon Microstructures and Microactuators for
Compact Computer Disk Drives UW-MEMS - Image Archive More from the grab bag:Japanese Technology Evaluation Center. What
some US micromachinists think about the micromachining efforts in Japan. The type of applications sponsored by the
Electronics Technology Office at DARPA. The results of a 1995 Xerox study on the
long-term benefits of using distributed MEMS to couple computation to
the physical world (slides). Dosing of small amounts of liquids. Drop on
demand micropumps. Biosensors and Bioelectronics. Selected papers on fiber optic sensors. The Inventors HomePage-Usenet.
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