Thin film engineering: preparation and understanding its properties
 

• Film synthesis techniques
• Film composition, constituent atom distribution, defect and impurity distribution
• Film structure: atomic structure and density
• Film chemical structure: atomic bonding and chemical states
• Film mechanical structure: hardness and elasticity
• Film electronic structure: resistivity
• Sub 10 nm films

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Surface and interface: process and tailoring
 

• Thin film surface morphology
• Thin film surface chemistry and passivation
• Thin film surface contamination identification and prevention
• Environmental effects on thin film surface
• Interface chemistry and interface state passivation
• Interface sharpness and tailoring

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State-of-art instrumentation package for fast problem solving
 

• X-ray photoemission spectroscopy (XPS)
• Field emission scanning Aguer electron spectroscopy (FE-AES)
• Time-of-flight secondary ion mass spectroscopy (TOF-SIMS)
• Field emission scanning electron microscopy (FE-SEM) with energy dispersive x-ray analysis (EDX)
• Laser Raman spectroscopy
• Fourier transform infrared spectroscopy (FTIR)
• n&k optical analyzer
• Atomic force microscopy (AFM)
• Optical microscopy
• Transmission electron microscopy (TEM)
• Rutherford backscattering (RBS)
• Nuclear reaction analysis (NRA)
• Dynamic secondary mass spectroscopy (SIMS)
• X-ray diffraction (XRD)

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