NANOWALL
NANOFLAKE

UPDATED DECEMBER 10, 2005
Yihong Wu/NUS

Carbon Nanowalls United States Patent Application 20030129305/Wu, Yihong/Priority date=Jan 8, 2002

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Three-Dimensional Nanostructured Materials Based on Two-Dimensional Nano-Sheets - WU Yihong
Link

Fabrication of a Class of Nanostructured Materials Using Carbon Nanowalls as the Templates
Y.H. Wu 1 *, B.J. Yang 3, G.C. Han 2, B.Y. Zong 2, H.Q. Ni 2, P. Luo 2, T.C. Chong 1 *, T.S. Low 1 *, Z.X. Shen 3
Link to Advanced Functional Materials article

Carbon Nanowalls Grown by Microwave Plasma
Enhanced Chemical Vapor Deposition**
By Yihong Wu,* Peiwen Qiao, Towchong Chong, and
Zexiang Shen
Advanced Materials Link

Nanowalls/Pictures/Yihong Wu
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Yihong Wu
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Nanowalls/Other Developments/Doug Baker
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NNPP

US Patent 6,819,034. Nov. 16, 2004
Inventors:  Pavlovsky; Igor (Austin, TX) 
Assignee:  SI Diamond Technology, Inc. (Austin, TX) 
Appl. No.:  642955
Filed/Priority date:  August 21, 2000
CARBON FLAKE COLD CATHODE 
What is claimed is:
1. An apparatus comprising:
a substrate;
a film of carbon flakes deposited on the substrate.

Press Release Source: Nano-Proprietary Inc.
Nano-Proprietary Receives Key Patent Grants
Thursday August 26, [2004] 8:45 am ET
--Applied Nanotech, Inc. (ANI), today announced that its
U.S. Patent claiming two-dimensional carbon nanostructures (dubbed by ANI ``carbon flakes''), with the
priority date of August 21, 2000, was allowed by the U.S. Patent Office--
Link to PR
Link to USP 6,819,034
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Doug Baker Email
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Note - "electrons are coherently scattered from the edge of a flake"
N S Xu and R V Latham
Dept. of Math. & Phys., Aston Univ., Birmingham, UK
Print publication: Issue 3 (14 March 1986)
Link
Boston College invention (most likely)

Nanowalls/ZnO/Optoelectronics/Nanocircuits/Solar Cells, Sensors and Photocatalysis/
nanowire, nanocircuit, nanobelt, tetrapod, nanobridge, nanopin, nanonail

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ZnO nanowalls - J.Y. Lao1, J.Y. Huang1, D.Z. Wang1, Z.F. Ren1 , D. Steeves2, B. Kimball2 and W. Porter2
Link

US Patent Application 20040105810 Priority Date Sep. 12, 2002
Mentions use as a supercapacitor

Link

Oregon State University, Hewlett Packard
Major advance made in transparent electronics
Zinc-tin-oxide thin film transistors
Link
NNPP (most likely)/CARBON NANOFLAKE/CNF/Texas

State of Texas to bring nanoflake technology to market through an (unnamed) Austin-based company.
"The University of Texas at Austin Center for Electromagnetic Materials and Devices has been presented
with a grant from the State of Texas to bring nanoflake technology to market through an Austin-based
company. Aside from the spacecraft and aircraft markets, commercial applications identified include use
for health monitoring in commercial buildings, roads, bridges, and any composite materials to increase
the integrity of composite skins and structures. They may also be used in advanced antenna designs,
signature management, lightning strike protection, and electromagnetic interference protection.
The
competitive advantage to these sensors is that they do not need to be powered, maintained, connected
through wires to data acquisition systems, and are small enough to be embedded virtually anywhere
without having any effect on the properties of the embedding material or its behavior.

Link (Look for - Title: Nanoflake Sensors - )
Osaka Gas Company Limited

Nanoflake carbon tube useful for electron emitting/
United States Patent Application 20030175462
Nishino, Hitoshi ; et al. September 18, 2003, Priority Mar 15, 2002 JP 2002-71937

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CANON/FLAKY CARBONACEOUS PARTICLE AND PRODUCTION METHOD THEREOF

Priority date April 4, 2003

Link

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University of Manchester/Geim/Graphene Sheet Transistor/Science

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Science article abstract
Link

Science/Electric Field Effect in Atomically Thin Carbon Films/Novoselov et al
Link

AZoNano article
Link

Manchester University release
Link

Carbon goes ballistic/The holy grail
Link

Geim/U of Manchester/Graphene sheets/Photos/Papers
Link

BBC/Radical fabric is one atom thick
Link

Science News/Graphite in Flatland: Carbon sheets may rival nanotubes
Link

MIT Technology Review article - Ultrathin Carbon Speeds Circuits
Link

University Of Manchester Intellectual Property Limited Spin out Page
Link

Two-dimensional atomic crystals

Link to article
Link to PNAS abstract
Center Of Super-Diamond and Advanced Films (COSDAF)

Uniform carbon nanoflake films and their field emissions
N. G. Shang, F. C. K. Au, X. M. Meng, C. S. Lee, I. Bello and S. T. Lee, 
Department of Physics and Materials Science,
City University of Hong Kong, Tat Chee Avenue, Kowloon, Hong Kong SAR, PR China
Received 28 January 2002.  Available online 14 May 2002.
Link
Georgia Tech

Ultrathin carbon speeds circuits
Researchers at the Georgia Institute of Technology have devised a method for growing
ultrathin graphite films by depositing a vapor of carbon atoms on a silicon-carbon crystal surface.
The Georgia Tech researchers have made films three atoms thick and several millimeters wide.
Link

Posted on the arxiv physics archive at arxiv.org/abs/cond-mat/0410240
Link
Matsushita/Graphite-Graphene sheets/Electron emitter

Priority date April 22, 2003
Link
NEC

United States Patent Application 20040217382 
Kind Code  A1 
Konuma, Kazuo  November 4, 2004
Priority date August 1, 2001
Electron emission film and electric field electron emission device
[0222] A description will be made of the eleventh embodiment of the present invention.
This embodiment is concerned with the electron emission film of a graphite film (not shown).
The graphite film does not have minute projections but has exposed potions where a work function
is small in places on its surface. That is, the graphite film is a film on which areas where a
work function is small are scattered.
Link
University of Virginia

Synthesis and Field Emission Testing of Carbon Nanoflake Edge Emitters
Holloway, Wang
"These flake-like structures with ultra sharp edges and large surface area may be promising
materials for use in the electron emission and electrochemical fields."
Link

Brian Holloway, Jianjun Wang
� �Synthesis and Field Emission Testing of Carbon Nanoflake Edge Emitters�,
provisional application filed October 2003.
� �Nitrogen Doped Carbon Nanoflake Field Emitter Synthesized by RFI PECVD on
Patterned Nickel Catalyst Layer� 2003 International American Vacuum Society (AVS) Symposium,
Baltimore, MD 2003 (talk presented by Jianjun Wang Nov 2003)

Link

IEEE/Synthesis and field emission testing of carbon nanoflake edge emitters
Jianjun Wang   Zhu, M.   Xin Zhao   Outlaw, R.A.   Manos, D.   Holloway, B.C.   Mammana, V.P.  
Dept. of Appl. Sci., Williams & Mary Coll., VA, USA
Abstract:
Nanometer edged carbon structures, carbon nanoflakes (CNF), have been synthesized on 50-150 nm diameter
nickel arrays. Scanning electron microscopy shows CNF preferentially growing on the Ni dots with the irregular
carbon flakes standing perpendicular to the substrate. Raman spectra of this structure show a typical carbon
feature with D and G peaks at 1350 and 1580 cm/sup -1/, respectively. Preliminary results of field emission testing,
including field emission spectroscopy, I-E curves, Fowler-Nordheim plots and stability curves, indicate that this
structure could act as a conductive, robust, edge emitter.
Link

The Virginia Nanomanufacturing Initiative
Nanoporous materials.
Materials have been developed with enormous internal surface area through controllable nanopores. A leading
example is the aerogel material produced in Norris� laboratory at UVA. Others include the
novel carbon nanoflake
material being produced by Holloway and Manos
and the nanoclay particles under study by Vold at CWM. Such
materials have many existing properties in their own right � such as extraordinary dielectric, optical, chemical,
acoustic and thermal properties, but can further be functionalized by controlled incorporation of active elements
within the pore array. Applications include biological sensors and assaying, novel compound magnetic materials,
and integrated optically active semiconductor nanostructures.
Link
Growth of Epitaxial Nanowires at the Junctions of Nanowalls

Hou T. Ng,1,2* Jun Li,1,2 Michael K. Smith,1 Pho Nguyen,1,3
Alan Cassell,1,2 Jie Han,1,2 M. Meyyappan1

1Center for Nanotechnology,
2Eloret Corporation, NASA Ames Research Center, Moffett Field, CA 94035, USA.
3Department of Chemical Engineering, San Jose State University, CA 95192, USA.
*To whom correspondence should be addressed. E-mail: [email protected]
Brevia Link
Science Magazine Link - (Easier to read/Better Format!) (Requires 'Sign in')
Nanalyze Postings - Graphene Sheets
Link
The United States of America as represented by the Secretary of the Air Force

Nano-graphitic flakes
[AKA carbon nanoflakes]
United States Patent 6,815,323
Lu, et al. November 9, 2004
[snips]
Assignee: The United States of America as represented by the Secretary of the Air Force, (Washington, DC)

FIG. 6 in the drawings shows the crystal structure of the desired nano-graphitic flakes. One flake of this material
has a diameter of three to four nanometers and has one atomic layer of thickness.
Link - USP 6,815,323
Link - RB posting
Printable Field Emitters Limited (Chilton, GB) [Most likely!]

United States Patent Application 20040131858 
Kind Code  A1 
Burden, Adrian Paul ;   et al.  July 8, 2004
Priority date March 13, 2001
--------------------------------------------------------------------------------
Field electron emission materials and devices
Abstract
Graphite comprises atoms arranged in discrete layers (100). The perpendicular distance between these layers
is the `d-spacing` (101). A field emission material is obtained by expanding the d-spacing (102). Such expansion
may be achieved by an intercalant that has been introduced between layers of the material. Such an intercalant
may reside, or may no longer reside, in the material. The material may be placed in position on a substrate by
a printing process, prior to expansion. Such field emission material may be used in cold cathodes in field
electron emission devices.
--------------------------------------------------------------------------------
Inventors: Burden, Adrian Paul; (Singapore, SG) ; Baigrie, Stephen Michael; (Swindon, GB)
Priority Mar 13, 2001

Claims
1. A field electron emission material formed of a material comprising layers of atoms, in which the inter-layer
spacing has been expanded.
5. A field electron emission material according to claim 1, wherein said layered material comprises graphite.
20. A field electron emission material according to any of the preceding claims, wherein said material has been
placed in position on a substrate by a printing process.
24. A field electron emitter formed from a field emission material according to any of the preceding claims, and
arranged to serve as a cathode in a field electron emission device.

[0009] Preferred embodiments of the present invention aim to provide improved field electron emitting
materials and devices that may be used in devices that include (amongst others): field electron emission
display panels; high power pulse devices such as electron MASERS and gyrotrons; crossed-field microwave
tubes such as CFAs; linear beam tubes such as krystrons; flash x-ray tubes; triggered spark gaps and related
devices; broad area x-ray sources for sterilisation; vacuum gauges; ion thrusters for space vehicles; particle
accelerators; lamps; ozonisers; and plasma reactors.

[0010] According to one aspect of the present invention, there is provided a field electron emission material
formed of a material comprising layers of atoms, in which the inter-layer spacing has been expanded.

[0014] Preferably, said layered material comprises graphite.

[0116] The operation and construction of such devices, which are only examples of many applications of
embodiments of this invention, will readily be apparent to those skilled in the art. An important feature
of preferred embodiments of the invention is the ability to print the field electron emission material, when
formed as an ink, as an electrode pattern, thus enabling complex multi-emitter patterns, such as those
required for displays, to be created at modest cost. Furthermore, the ability to print enables low-cost
substrate materials, such as glass to be used; whereas micro-engineered structures are typically built
on high-cost single crystal substrates. In the context of this specification, printing means a process that
places or forms an emitting material in a defined pattern. Examples of suitable processes are
(amongst others): screen printing, Xerography, photolithography, electrostatic deposition, spraying, ink
jet printing and offset lithography.
Link US Patent Application 20040131858
DuPont

Re 'intercalation ' and 'expansion' of graphitic layers see:
United States Patent Application 20040017141 
Kind Code  A1 
Cheng, Lap-Tak Andrew ;   et al.  January 29, 2004 
Priority date April 24, 2002

--------------------------------------------------------------------------------
Electron field emitter and compositions related thereto
Abstract
This invention provides compositions of matter that contain an electron emitting substance and an
expansion material. The expansion material may, for example, be an intercalation compound. When
a film is formed from the composition, expansion of the expansion material typically causes rupturing
or fracturing of the film. No further treatment of the surface of the film is typically required after
expansion of the expansion material to obtain good emission properties. A surface formed from such
a fractured film acts as an efficient electron field emitter and thus is useful in vacuum microelectronic
devices.
--------------------------------------------------------------------------------
Inventors: Cheng, Lap-Tak Andrew; (Newark, DE) ; Roach, David Herbert; (Hockessin, DE) 
Correspondence Name and Address:  E I DU PONT DE NEMOURS AND COMPANY
Link US Patent Application 20040017141
MITSUBISHI CHEMICAL CORPORATION, FRONTIER CARBON CORPORATION

WO 2004/089821, 21 October 2004, Priority date April 7, 2003
CARBON PARTICLE AND METHOD FOR PREPARATION THEREOF
From abstract:
In a preferred embodiment, the graphite thin film is a thin film formed by the lamination of 5 to 50
layers of a graphene sheet structure, the graphite thin film occupies a space of a thickness of 10 to
1000 nm, and the carbon particle has a BET surface area of 50 to 3000 m2/g. The above carbon particle
is a novel substance which has a fine structure of a nano-size and is useful as a functional material.
WIPO Link to WO 2004/089821
ESP Link to WO 2004/089821
Motorola

Of interest re dendritic form
United States Patent  6,087,765 
Coll ,   et al.  July 11, 2000
Priority date Sept. 30, 1996

Electron emissive film

Abstract
An electron-emissive film (170, 730) is made from graphite and has a surface defining a plurality
of emissive
clusters (100), which are uniformly distributed over the surface. Each of the emissive
clusters (100) has
dendrites (110) extending radially from a central point (120). Each of the dendrites
(110) has a ridge (130), which has a radius of curvature of less than 10 nm. The graphene sheets (160)
that form the dendrites (110) have a (002) lattice spacing within a range of 0.342-0.350 nanometers.
Link to USP 6,087,765
Nano-Proprietary

United States Patent  6,573,643 
Kumar ,   et al.  June 3, 2003
Priority date Oct. 2, 2000 (with parents back to Mar. 16, 1992)

Field emission light source

Abstract
A field emission cathode for use in flat panel displays is described including a layer of conductive
material and a layer of amorphic diamond film, functioning as a low effective work-function material,
deposited over the conductive material to form emission sites. The emission sites each contain at least
two sub-regions having differing electron affinities. Use of the cathode to form a computer screen is also
described along with the use of the cathode to form a fluorescent light source.

Inventors:  Kumar; Nalin (Cherry Hill, NJ); Xie; Chenggang (Phoenix, AZ) 
Assignee:  SI Diamond Technology, Inc. (Austin, TX) 
Appl. No.:  677361
Filed:  October 2, 2000

Such a carbon film may comprise several different types of structures, including
carbon flakes as disclosed
in U.S. patent application Ser. No. 07[09?]/642,955
.
17. A light source comprising:
a field emitter deposited over a conductive filament; and
an anode surrounding said filament, said anode operable for emitting light in response to receipt of
electrons from said field emitter deposited over said conductive filament.
23. The light source as recited in claim 17, wherein said field emitter comprises
carbon flakes.
Link to USP 6,573,643
GrafTech

US Patent Application 20040033189 
February 19, 2004
Priority date Aug 15, 2002
[0051] The aforementioned inventive methods may be used to form nano-sized expanded graphite
particles. A nano-sized particle has at least one dimension that is less than about 1 micron. Preferably,
the nano-sized particle has at least one dimension of less than about 100 nm, more preferably less than
about 50 nm. In preferred embodiments of the nano-sized particle graphite, preferably the thickness of
the particle is less than about 10 nm, more preferably less than about 5 nm, even more preferably less
than about 1 nm, and most preferably less than about 0.5 nm. For example, the particle may comprise
a single graphene layer.
Link to US Application 20040033189
Link to RB posting
Some Definitions:

Graphite - including Flake Graphite - Link
Graphite -
Link
Graphene - 
Link1 Link2
Image Gallery - Graphite and Graphene -
Link
Graphene C62H20, Graphene with adatom C63H20, Graphene with adatom pair C64H20 -
Link
--Some Background--

Isle Bright Limited/CFB PLC
"Non recoverable expenses"
"A further �200,000 has been taken as a provision against Management Fees to Isle Bright Limited
and its
cold cathode technology. The board took the decision in January 2000 to terminate its support
due to insufficient market demand."
Link

ISLE BRIGHT LIMITED PATENT FILINGS

1) WO 99/44215
Filed Feb. 27, 1998
Priority date Feb. 27, 1998
Inventors:
OBRAZTSOV, Alexandr Nikolaevich
PAVLOVSKY, Igor Jurievich 
VOLKOV, Alexandr Pavlovich

Abstract:
The present invention pertains to the field of vacuum electronics and more precisely relates to a field emitter
intended for use as an electron source (cathode) in vacuum electronic devices for various purposes such as
cathodic luminescent light sources, light�emitting indicators and flat displays for the optical representation
of information. The field emitter of the present invention consists in
a carbon film whose main portion is made
of graphite clusters having their basic crystallographic planes preferably oriented so as to be perpendicular to
the plane of the substrate on which said film is located
. This emitter exhibits improved emission parameters
that enable its use for the above�mentioned purposes. The method for producing this emitter comprises
previously applying diamond crystallites on an electro�conductive substrate and depositing graphite clusters
on said crystallites in order to obtain a monolithic film. The parameters of the deposition process are selected
so that the crystallographic basic planes in the graphite clusters are preferably oriented in a direction
perpendicular to the surface of the substrate. These parameters are also selected in order to provide for a
modification in the electronic configuration of the carbon atoms in the thin boundary layer so as to reduce
the work function of the electrons.
WIPO Link to WO 99/44215
Espacenet Link to WO 99/44215

2) WO0040508
Filed Dec. 30, 1998
Priority date Dec. 30, 1998
Inventor:
OBRAZTSOV ALEXANDR NIKOLAEVICH
Abstract:
The present invention relates to a method for producing a
film-type carbon material, wherein said material is
made of
plate-like graphite crystallites or carbon nanotubes which are deposited from a carbon-containing
gaseous phase using an electric discharge. The material thus obtained can essentially be used in the
production of field emitters or electrodes for electrochemical devices.

Espacenet Link to WO0040508
Marubun Corporation/Nagoya University/NU EcoEngineering Co.
Asia Nanotech Digest
Nano Science and Technology in Asia
Countries: Japan, China
August/September 2004
12. Marubun Markets Apparatus for Carbon Nanowalls
The semiconductor trading company Marubun Corp. has joined with Nagoya University to
market an apparatus to synthesize carbon nanowalls. This form of carbon was initially
developed in Singapore. Researchers at Nagoya University have succeeded in producing them
by a commercial method. These nanowalls emit electrons more readily than carbon nanotubes;
thus, they may boost the performance of new-generation field-emission displays. The university
group has succeeded in synthesizing carbon nanowalls of varying density, and in thicknesses
ranging from several nanometers to tens of nanometers.
Marubun has obtained exclusive marketing rights to the technology that has been developed to
the commercial stage by the university-affiliated start-up NU EcoEngineering Co. This month,
Marubun will begin accepting orders this month for the specially designed apparatus to
synthesize carbon nanowalls, each of which is expected to cost approximately 50-100 million
yen (US $450-900K).

Link to PDF file

PLASMA AND NANO

Many nanoflake photos.
Link to PDF file
Shimane Masuda Electronics Co., Ltd. (SME)

Nano-Proprietary, Inc. and Shimane Masuda Electronics Sign Development Letter of Intent with Rights
to a Joint Venture and/or License Agreement
``We believe that this agreement will greatly contribute to a friendly development between the Shimane
Prefecture and
the State of Texas,'' said Yuzuru Ishikawa, president & CEO of Shimane Masuda Electronics."
Link

State of Texas to bring nanoflake technology to market through an (unnamed) Austin-based company.
"The University of Texas at Austin Center for Electromagnetic Materials and Devices has been presented
with a grant from the State of Texas to bring
nanoflake technology to market through an Austin-based
company.
Link (Look for - Title: Nanoflake Sensors - )

My observations

SME intends to promote a friendly development with the State of Texas and the State of
Texas has provided (indirectly through the University of Texas at Austin) an unnamed company in Austin
a grant to bring nanoflake technology to market. NNPP is the only company in Texas that I am aware of
that has nanoflake technology. In view of these facts, I postulate that SME and NNPP may be developing
nanoflake technology. SME produces LNFETs (transistors). Nanoflakes would be a terrific base for
transistors, as would CNTs. Perhaps that is the SME/NNPP/Texas co-development thrust - nanoflake transistors
and/or nanoflake electronics of whatever kind with a CNT involvement.
However, I also note that the agreement and PR are quite specific in mentioning "CNT sources". Nanoflakes
are not CNTs!
So perhaps NNPP/ANI is cooperating with another company on nanoflake commercialization and made it quite
clear in the PR announcement and SEC 10QSB filing on Oct. 29, 2004, that CNTs were involved with SME so
as to distinguish the SME involvement from any others involving carbon nanoflakes.
Link to SEC 10QSB filing

This statement in the 10QSB is intriguing:
3-4. For the development of products the Parties will investigate the Canon's and Toshiba�s patents related to
the ANI patent licensed to Canon thoroughly so that the Parties can develop the products without any
infringement.

I find it intriguing because the Canon license dealings with ANI involved ANI's SED technology which does not
involve carbon nanotubes at all but involves a carbon film which in view of the SED features creates an electron
emission. Canon and Toshiba each have many, many SED patents of their own as well but none have any CNT
involvement. So I wonder about SME's concerns. ANI does have carbon flake technology and I can readily see
where, because of the film nature of the flakes, SME could wish to ensure that their co-development work with
ANI does not infringe on any Canon or Toshiba patents or conflict with the license deal with Canon. Perhaps it is
just a general concern by SME that they avoid any difficulties with any Japanese company that has had prior
dealings with ANI.

So, in view of all of the above I can't quite determine whether the ANI SME agreement involves just CNTs or flakes
as well.
SME & ANI & Xray Flat Panel Imaging
Perhaps this is what SME & ANI are cooperating on!
Link to similar activity involving xray flat panel imaging
Link to RB message
PHILIPS/Carbon Flakes(undoubtedly Carbon Nano Flakes)/FED TV
WO2004097883
Link to WO2004097883
Link to RB message 1
Link to RB message 2
Link to RB message 3

This is the first instance I have seen of an application from Philips for applying carbon flakes
to a substrate for a FED TV display.
The basic patent for nanoflakes on a substrate is held by NNPP with PAVLOVSKY the inventor.
Is Philips using 'nano' flakes? Not disclosed - they only identify them as "carbon flakes".
See section "NNPP" above.
And consider this. The Philip's disclosure says "Suitably, said emitting particles are anisometric
particles, such as graphite flakes, rods, wires, carbon nanotubes or a combination thereof." And,
"The emitter particles 2 are in this example graphite flakes, but may be constituted by any anisometric
particles, such as rods, wires or carbon nanotubes. The
graphite flakes, with a nominal size of preferably
less than about 4-10 microns, have sharp emitting edges and are
favorable with respect to their emitting
properties in a field emission device."
So - the graphite flakes are favorable compared to nanotubes. I can only conclude that they MUST
be carbon nano flakes as the only carbon flakes I know that provide better emission properties
than nanotubes are carbon nano flakes!
Meijo University, Nagoya University
M. Hiramatsu
Department of Electrical and Electronic Engineering, Meijo University, Tempaku, Nagoya 468-8502, Japan
K. Shiji and H. Amano
Department of Materials Science and Engineering, Meijo University, Tempaku, Nagoya 468-8502, Japan
M. Hori
Department of Electrical and Electronic Engineering and Information Engineering, Nagoya University, Chikusa,
Nagoya 464-8603, Japan

Fabrication of vertically aligned carbon nanowalls using capacitively coupled plasma-enhanced chemical
vapor deposition assisted by hydrogen radical injection
Link
HIRAMATSU, Mineo; HORI, Masaru ( Meijo University and Nagoya University - most likely)
WO 2005/021430
10 March 2005
CARBON NANOWALL PRODUCING METHOD, CARBON NANOWALL, AND PRODUCTION APPARATUS

To provide a novel method of producing a carbon nanowall
and an apparatus  suitable to implement the method.

A source gas (32) the constituent elements of which include at least carbon
is introduced into a reaction chamber (10). In the reaction chamber (10),
parallel-plate capacitive-coupling plasma (CCP) generating mechanism (20)
having first and second electrode (22, 24) is provided. With this, an
electromagnetic wave such as an RF wave is applied to produce a plasma
atmosphere (34) in which the source gas (32) is changed to plasma. In a
radical generating chamber (41) installed outside the reaction chamber (10),
a radical source gas (36) containing at least hydrogen is decomposed with
an RF wave or the like to produce hydrogen radicals (38). The hydrogen
radicals (38) are injected into the plasma atmosphere (34), thereby forming
a carbon nanowall on the surface of a substrate (5) placed on the second
electrode (24).
Link to WO 2005/021430
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