James Buckner at Qimonda

QNA FE 3FO LE LPE TECH1

[email protected]

Location: K26320

Phone: 804-952-8536

Pager: dial 1-800-759-8888, enter 1093054, or click the pager:

300mm Parts � ASML Datamine � Briefing � CD SEM � CD SEM Datamine � Child Lots � Citrix QAG � Citrix RHAMS � Chamber-level Control � Close the Gap � CNAF � Conference Rooms � Contact List � Current Lot Cycle Time � Data Warehouse � Directory � DUV Flipper � DUV Restrictions � E8 qShare � EDA � EDC � FAB300 � Flow Viewer � FMEA � H: drive (4G) � ICN � Integration � Kerfs � Litho � Litho Projects � Litho WIP � Lot List � Lots by Tool � Menu � More... � OCAP's � Overrides � Process&passdownLocationID=73">Passdowns � � � PCRB � POR � Process Characterization � Process Data � Process Reference � PTO Calendar � Qimonda Richmond � Qinetix (x1818) � Qual Data � Quality � Randomization � RealisFA � Resist � Restrictions � Reticle Dedication � Reticles � RTD � STEPS � SWR's � SWR Lots � Targoss � TCN � Technology � Tool Time � Track Recipes � UserData � Weather � Web Mail � WIP Macros � Work Centers � WYA � Yield Maps � Yield Meeting � Yield Meeting Coverage

Notes:

1G GH70 M2 reject recoverySWR-0834060
1G GV70 C2 reject recoverySWR-0833001
512M GV70 C2 reject recoverySWR-0833050
1G GH70 CL reject recoverySWR-0818047; replaced by SWR-0907005
512M GV70 CL reject recoverySWR-0835017
1G GV70 CL reject recoverySWR-0835059; replaced by SWR-0907011
1G GH70N C2 reject recoverySWR-0836006
1G GH70N CL reject recoverySWR-0852010
Layer ownershipC1, C2, CL, M2, ML
Litho sustainersx6984
Admin 1st floorR-RIC-CapeHenry-10; R-RIC-Cold Harbor-14; R-RIC-Lexington-6; R-RIC-Roanoke-6; R-RIC-Wyndham-20; R-RIC-Yorktown-14

Admin 2nd floorR-RIC-Bull Run-6; R-RIC-Cardinal-10; R-RIC-Chesapeake-18; R-RIC-Cumberland Gap-4; R-RIC-Dutch Gap-4; R-RIC-Elm-12; R-RIC-Falling Creek-4; R-RIC-Magnolia-14; R-RIC-Maymont-4; R-RIC-Powhatan-10; R-RIC-River Birch-20; R-RIC-Rotunda-20; R-RIC-Sequoia-14; R-RIC-Skyline-12 (Restricted); R-RIC-Swift Creek-4; R-RIC-Sycamore-14; R-RIC-Tuckahoe-6; R-RIC-York River-18

Commons 2nd floorR-RIC-Appomattox-36; R-RIC-Ashland-14; R-RIC-Chesterfield (training)-14; R-RIC-Glen Allen (training)-14; R-RIC-Hanover-14 (Training); R-RIC-Natural Bridge-4; R-RIC-Stingray Point (training)-18

K-Building 1st floorR-RIC-Cavalier-28; R-RIC-Deep Run-4; R-RIC-Gaines Mill-10; R-RIC-Keer-4; R-RIC-Longwood-4; R-RIC-Old Church-4; R-RIC-Pebble Creek-9; R-RIC-Rawley Springs-14; R-RIC-Rockbridge-14; R-RIC-Sandy Bottom-4; R-RIC-Training Room-1(Restricted); R-RIC-Training Room-2(Restricted); R-RIC-Westmoreland-14; R-RIC-White Oak-8

K-Building 2nd floorR-RIC-Blacksburg-10; R-RIC-Blue Ridge-10; R-RIC-Byrd Park-4; R-RIC-Cape Charles-4; R-RIC-Church Hill-8; R-RIC-Colonial Downs-4; R-RIC-Dogwood-4; R-RIC-Huguenot-4; R-RIC-Marshall-10; R-RIC-Midlothian-10; R-RIC-Montpelier-4; R-RIC-Monument-10; R-RIC-Portsmouth-4; R-RIC-Providence-4; R-RIC-Rivanna; R-RIC-Salem Church-12; R-RIC-Shenandoah-14; R-RIC-ShockoeBottom-14; R-RIC-Stonewall-4; R-RIC-Urbanna-10 (restricted); R-RIC-Woodbridge-4

K-Building 3rd floorR-RIC-BelleIsle-12; R-RIC-CraneyIsland-12; R-RIC-Manassas-8 (Restricted); R-RIC-MonroeIsland-10; R-RIC-Pamunkey-8; R-RIC-Potomac-20 (restricted); R-RIC-Quantico-12(Restricted); R-RIC-ScarlettOak-12 (Restricted); R-RIC-Wintergreen-36 (restricted)

POR metrology wafers1, 8, 15, 22
Sampling chains are used atM2 CD, M2 OVL, ML OVL
EDA contactsMichael Harrell
Etch contactsChris Giacofei (C1 etch); Matt Radtke (M2 etch); Liz Donohue (ML etch); Peter Welti (C2 and CL etch)
Films contactsKam Hettiaratchi (M1, M2, C1/C2 liner)
Litho Distribution ListsDL-RIC-DPT-LithoSustaining300, DL-RIC-LithoProduct300mm-U
MAG contactsTony Schirmer and Michael Tonnesen
PLY contactsSteve Retzloff for 80nm and 90nm; Ed Leonard for 70nm
WETS contactTom Power
Resolution1280 x 1024 (for Synapse)
HR business partnerDeanna Goldstein
Yield NomenclatureHT = High Temperature yield; LT = Low Temperature yield; merge = merged HT and LT yield
Zone alignmentARF layers on 70nm; AA, GC on 80nm
My counterpartsMichael Gumprecht in QD
Reticle ID

M9267C01ML3 0004010531R

\____/|| \ /  \ /||

    |       +----> Site: R=Richmond, S=Dresden
    ||       +-----> Copy 
    |      +-------> Kerf ID
    ||   +-----------> Fab: 4=QR3, 6=QR2, 8=QD
    |  +-------------> Reticle type: 000=binary, PSM=PSM, DCH=daisy chain
    |+----------------> Reticle version
    |++-----------------> Layer
    ++-------------------> Design version
  +-----------------------> Part
Calc-defaultCalc-default = target - gradient * dose
Reboot ASML server

  • Log in

     

  • Start Up / Shut Down

     

  • Shut Down System & Unix

     

At the ok prompt:

 

  • boot disk0 (for 4.0) or boot disk1 (for 4.1)

     

  • User name: atl.2839 then OK

     

Overlay BiasACI - ADI
iLoop databaseR2R302P, table LITHO_ENGAGE.CH_LOTHISTORY_ALL
Field TermsFRot = (FRotX + FRotY)/2

 

ARot = (FRotY - FRotX)/2

 

FRotX = FRot - ARot

 

FRotY= FRot + Arot

 

 

Mag = (MagX +MagY)/2

 

AMag = (MagX - MagY)/2

 

MagX = Mag + AMag

 

MagY= Mag - Amag

Residuals chartsResiduals charts pull data from Residual Std., the second to last box in the lot alignment report.
Add parametrics to an SWRInstructions

Alignment Evaluation Procedure

  1. Release the lot and modify the scanner job once it downloads as shown below.

  2. Click on the "Lot Type" tab and select "Alignment Evaluation" on the left side of the screen and "Exposed Alignment Evaluation" on the right side of the screen.

  3. Next click on the "Alignment" tab and change the "Alignment Monitoring" pull-down menu to "Odd".

  4. Add the lot back to the queue.

  5. Add add a sampling override to the lot at ADI overlay.

More...

Acronyms � ADAM � Aetna � Alignment Evaluation Procedure � BEER � CBI � CD SEM Image Import � CSS � Daily � Directions � FABAAG � FEM Analysis � Hold Lots � HTML � iLoop � James Buckner � Kronos � Layer Owner Knowledgebase � LIDS � Litho Documentation � LithoMetro � Litho Org Chart (300mm) � Litho Product Group � Litho Top Ten � Lot from EAJob � Macros � Mail � Map � MATLAB � Metrology � Metrology Locations � Mfg Look-Ahead � MPM � Overlay Analysis � Pattern Layers � Payroll � Phone Manual � Phonemail � Photolithography � QD3 Contact List � Qimonda Org Directory � Qimonda Savings Plan � QR Technology Roadmap � Reading � Sampling Tables � SHPS � SOAK Guidelines � SPC Reports � SPC Tracking � Tau � Training Plan � Wafers Starts Plan � Wafer Yield Analysis

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