| MEMS RESEARCH |
| MY MEMS Devices |
| Cool MEMS movie !!! |
| MEMS Websites |
| My Reference Books |
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| Universities/Industrial Partners for MEMS Research: |
Current University/Industrial Partners: [Malaysia] Universiti Teknologi PETRONAS, Bandar Seri Iskandar, 31750 Tronoh, Perak PETRONAS Fertilizer Gurun (PFK), Gurun, Kedah Kriptic Devices Sdn Bhd, 56100 Kuala Lumpur [United States] OAKLAND University, Rochester, Michigan Michigan Nano Fabrication Facility (MNF), University of Michigan, Ann Arbor, Michigan [Singapore] FTD Solution Ltd , Singapore [Research Grant] Michigan Space Grant Consortium (MSGC), University if Michigan, Ann Arbor, Michigan |
| We would welcome for any universities or industries to colloborate with us in MEMS research. If you would like to get more information please contact Mr. Mohd Haris at [email protected]. Our areas of research interest are as follows: |
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| - MEMS Electrostatic & Electro Thermal Sensors & Actuators (Resonator, Displacement sensor, Force Sensor, Accelerometer, Gripper, ... etc) - MEMS Gas Sensor (Ammonia, Hydrogen, Hydrogen Sulfide,... etc) |
| Current Research on MEMS: |
| The final chip layout for the fabriation at AMI through MOSIS is shown below. The chip with a dimension of 3mm x 3mm, consists of a Nano Newton Force Sensor, a Piezo Resistive Accelerometer, and an Electrostatic Micro Mirror.Chip Layout was design using Mentor Graphic with AMI 0.5um CMOS 3 Metals 2 Poly technology. |
| [2] Sensors Design & Fabrication Using AMI 0.5um Technology. |
| 1. MicroElectroMechanical System Design. "James J. Allen" |
| 2. Microsystem Design."Stephen D. Senturia" |
| 3. Semiconductor Devices."S.M. Sze" |
| 4. Micromachined Transducers Source Book. "Gregory T.A. Kovacs" |
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| Journal & Conference Paper Publications: |
| 5. Fundamentals of Microfabrication. "Marc J. Madou" |
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| Microchip Layout in Mentor Graphic |
| For best view, set your player mode to continous mode (repeat ON). Do not play direct from the Web. Download the file instead. |
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| Micro Gripper Design with COVENTOR |
| Coming Soon |
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| 6. Advanced Engineering Mathematic. 9th Edition "Erwin Kreyszic" |
| 7. Engineering Mechanics. SI Edition "R.C. Hibbeler" |
| 8. System and Control. "Stanislaw h. zak" |
| 9. Device Electronics for Integrated Circuit. "Richard S.Muller, Theodore I.Kamins, Mansun Chan" |
| [1] Some Fabrication Results from MNF. |
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| 3-D Micro Probe |
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