KENNETH W. CROSS
1220 Caminito Septimo; Cardiff, CA 92007 / (760) 944-9778 / powerglider@adelphia.net


OBJECTIVE AND SUMMARY
Widely-skilled UHP Process (Chemical) Engineer with Semiconductor Fab and Fab-Gases 
O.E.M. experience including DUV-Pumped halide plasma (etch, chamber-clean, etc.) R&D  
seeks new challenges
?	Process Engineering of UHP population-inverted / plasma gas systems from theoretical (chemical /kinetic 
/thermodynamic modeling) to empirical (SPC / six-sigma DOE - D.M.A.I.C.- based) system optimization 
across various ranges of parameter values, substrate gases / mixtures, applications, and energy densities
?	Ultra-High-Purity Fluoride, Chloride, Bromide, Oxide, etc. Gas Mfg., Purification, Delivery, Reaction / 
Utilization, and Recovery Process Design & Development (componentry and systems) Experience
?	Knowledge in UHP HazGas process design issues such as contamination modes, surface passivation, 
hydride & particle generation, fluoropolymer (seal) erosion corrosion, vac. component degradation, etc.
?	Knowledgeable in performances of specific fluoropolymer compounds under differing Halide-gas seal 
service, and most chemical and physical properties of semiconductor mfg. support process materials.
?	Demonstrated Expertise with Deposition, Etch, Chamber/surface clean Plasma (& gas recovery) Systems
?	Knowledge and experienced with (non-directed and magnetron – type) AC, DC, and mixed-wave Plasma 
Generators including custom and off-shelf power supplies from Advanced Energy Systems and MKS.
?	Skilled in design, spec, & implementation of sensing & control systems for challenging applications.
?	Product Design and Development on AutoCAD (R13 - R2000i), Mechanical Desktop, and SolidWorks.
?	Project Management & Lead Engineer for plasma/excited-state gas projects under various corp. structures
?	Adept with UHP process / product rollout from R&D to Engineering and Production
?	16 years' experience in engr. / product development environment incl. 10 yrs in semiconductor support.

PROFESSIONAL EXPERIENCE

BOC EDWARDS CORPORATION, San Marcos, CA 	1996 - Present
Senior Development Engineer
?	Designed, built, started up, tested, ran, & maintained UHP reaction and separation/purification processes 
for production & packaging of chemical precursors used in the manufacture of semi-conducting devices. 
?	Achieved product purities to sub-ppb levels in most contaminants
?	Purified compounds and metallic container surfaces to <= 10 ppb H2O per lbmol N2 surrogate gas
?	Supervised contractors, qualified & selected vendors, validated methods, controlled design docs
?	Invented variety of liquid, gas, and plasma based and electro- and chemical Surface Treatment Processes. 
?	First to incorporate ultrasonic cleaning into UHP gas production cylinder preparation
?	First to Electro-polish Nickel, SS, and Aluminum surfaces of certain geometries and morphologies
?	First to successfully clean inside of gas cylinders with glow discharge plasmas
?	Awarded several Innovation Awards and US Patents / Invention Records (see RECOGNITION section).
?	Employed statistical techniques for empirical discovery and continuous process improvement.
?	Reduced organic and particulate contamination of UHP chemicals by >4 generations
?	Reduced Fluorine waste by ~ 85% in Etch Cycle of Novellus and AP Chambers
?	Improved WF6 recovery by ~18%
?	Generate controlled documentation to support system start-up, operation, & planned maintenance, 
Process Design Engineer
?	Designed process panel layouts for UHP Gas reaction, distillation, and absorption systems
?	Mass & Energy Balances, PFD's, PID's, specified componentry for the sensing and control
?	Designed cryogenic distillation systems for corrosive metal- and hydrogen-halides


KENNETH W. CROSS	PAGE TWO


IPEC / ATHENS CORPORATION, Oceanside, CA 	1994 - 1995
R&D Engineer
?	Designed and built Reaction (production), purification, and delivery systems.
?	Design, build, and test processes and machinery for electrochemical synthesis of oxidizing compounds for 
wafer etching and related applications
?	Troubleshoot wastewater neutralization systems:  Spec and install controls, tune and maintain system. 
Field Service Engineer
?	Tested, maintained, and upgraded distillation systems for wafer etchant chemistries at Intel / Rio Rancho.
?	Tuned control systems, sourced spare parts, rudimentary Planned Maintenance scheduling
?	Maintain Equipment in GMP operation


SOMACARE SYSTEMS, Highland Park, CA 	1992 - 1993
Sole Proprietor
?	Manufactured, sold, and distributed my own formulation of industrial shampoos  


DESALINATION SYSTEMS / TRISEP, San Marcos & Goleta, CA 	1989 - 1992
Process Engineer
?	Increased productivity: Develop and implement manufacturing processes, develop product testing
?	Improve product quality: of reverse-osmosis and micro / nano filtration membranes.  


CHEMMETALS, Baltimore, MD 	1987 - 1988
Process Engineer
?	Process development and optimization at a manganese ore refinery.
?	Improved processes and controls for the manufacture of manganese chloride and various manganese oxide-
based compounds. 


ROSS, MURPHY, & FINKELSTEIN, Baltimore, MD 	1986 - 1987
HVAC Engineer / Trainee
?	Performed HVAC / facilities energy studies / calculations for large buildings. 
?	Used Trane Co. software to back out design data for comprehensive HVAC system optimization. 


ENVIRONMENTAL ELEMENTS CORP, Baltimore, MD 	1984 - 1986
Field Service Engineer
?	Performed assembly, installation, start-up, controls checks, system efficiency tests, and operator training on 
automatically regenerating water purification / polishing systems for commercial and municipal facilities.
?	Managed technicians, chemists, geologists and work crews (concrete workers, carpenters, general laborers). 
?	Set up tertiary water treatment systems at more than 50 locations across the continent. 
?	This position entailed hands-on construction of large filter systems, training and supervising a variety of 
tradesmen, millwrights, and skilled labor crews, verifying control circuit logic, debugging/diagnosing 
control system and process equipment failures, tuning process equipment, and training operators.







KENNETH W. CROSS	PAGE THREE

RECOGNITION

US Patent Award # 6361020, "GigaValve Apparatus for dispensing UHP Gases with Modular Assembly"
US Patent  Appl. # A00A237, "Apparatus and Process for cleaning UHP gas cylinders with glow-discharge 
plasmas of noble and non-noble gases"
US Patent  Appl. # M00A212, "Microenvironment for the valving of UHP Gas Cylinders"
US Patent  Appl. # M00A211, "Neck Insert for eliminating micro-rough portion from wetted Area of gas 
cylinder"
BOCE Innovation Award:  Plasma Treatment for UHP Gas Cylinders
BOCE Innovation Award:  Ultrasonic Surface Treatments for UHP Surfaces.
BOCE Innovation Award:  Fluorine Recycle Unit

EDUCATION
?	Virginia Polytechnic Institute: (Virginia Tech - Blacksburg, VA) B.S., Chemical Engineering, 5/1984, 
Virginia Polytechnic Institute: (Virginia Tech - Blacksburg, VA) Minor, Chemistry, 5/1984
?	Post grad Lab- and course-work in Chemical Engineering, concentration on surface chemistry, 
continuous solvent extraction & process engineering. About 1/3 to M.S. before accepting 1st job, 1984
?	NC State (Raleigh-Durham, NC) I.E.S. Six Sigma Green / Black belt Training, 2002
?	ASM Prof. Technical Series: Mechanisms and Practices in Corrosion for scientists and engineers, 2000
?	ASM Prof. Technical Series: Advanced Metallurgy for scientists and engineers, 2000
?	Dale Carnegie Institute Certification:  Effective Employee Relationships & Interaction Management 
Principals and Techniques, 1992

PROFESSIONAL MEMBERSHIPS

A.I.Ch.E. member since 9/1983
ASM member since 1/1998
BioCh.E. Group, VPI&SU 1984

SKILLS

Chemical Analysis, Intermediate, Currently used, 12 years
Machinist/Mechanic/Millwright, Advanced, Currently used, 25 years
Chemical Technician, Advanced, Currently used, 18 years
Electrical Technician, Intermediate, Currently used, 15 years
CAD Designer, Intermediate, Currently used, 6 years
Solid Modeling, Intermediate, Currently used, 4 years
PC Architecture, Intermediate, Currently used, 6 years