ABSTRACT
Optimizing a mid-infrared Cavity Ring Down Spectroscopy on a RF Silane plasma
J. Remy, G.M.W Kroesen, Technische Universiteit Eindhoven, Applied Physics Department, den Dolech 2, P.O Box 513, 5600 MB Eindhoven, The Netherlands - EU
Cavity Ring Down Spectroscopy (CRDS) has become a widely used technique for the optical absorption analysis of atoms and molecules because of its great sensitivity and the simplicity of its use. We intend to apply this diagnostic technique to study dust particles in a silane plasma. Therefore, a CRDS experimental set-up is being developed and optimized, using multimode lead-salt laser diodes that together provide a spectral coverage to wavelengths between 2 and 6 mm. The poster presents the response of the ring down cavity to an IR laser radiation and describes the attempt to characterize the IR laser diode beam. Preliminary results show that CRDS in the IR is feasible. Yet, limitations remain that are closely linked to the spatial structure of the laser beam. Because of recent optimization in the experimental set-up, we expect promising results soon.
